Handbook of Semiconductor Silicon Technology

Auteur: Karen Reinhardt
Taal: Engels
Handbook of Semiconductor Silicon Technology

Samenvatting

This handbook is a comprehensive summary of the science, technology and manufacturing of semiconductor silicon materials. Every known property of silicon is detailed. A complete set of binary phase diagrams is included. Practical aspects such as materials handling, safety, impurity and defect reduction are also discussed in depth.

Fundamentals in the areas of silicon precursor compounds, polysilicon, silicon crystal growth, wafer fabrication, epitaxial and CVD deposition are addressed by experts in these fields. Materials properties covered include electrical, optical and mechanical properties, deep level impurities and carrier lifetime, and thermochemistry, as well as specific sections on oxygen, carbon, and nitrogen impurities. The book contains an extensive set of references, tables of materials constants, and silicon properties, and a presentation on the state of the art of materials manufacturing.
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Productspecificaties

Inhoud

Taal
Engels
Bindwijze
Hardcover
Druk
2
Verschijningsdatum
december 1990
Aantal pagina's
815 pagina's
Illustraties
Nee

Betrokkenen

Auteur
Karen Reinhardt Werner Kern
Co-auteur
Werner Kern
Redacteur
Karen Reinhardt
Co-redacteur
Werner Kern
Uitgever
William Andrew Publishing

EAN

EAN
9780815512370

Overige kenmerken

Extra groot lettertype
Nee
NUR code
950

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