Micro Electro Mechanical Systems (MEMS) Technology, Fabrication Processes & Applications

Micro Electro Mechanical Systems (MEMS)
  • Engels
  • Hardcover
  • 9781608764747
  • maart 2011
  • 391 pagina's
Alle productspecificaties

Samenvatting

So-called top-down technologies have enabled us to manufacture and fabricate structures even smaller than the micrometer scale. MEMS (Micro Electro Mechanical Systems) technologies were developed by applying semiconductor microfabrication technologies to make three-dimensional microstructures and mechanical systems in the late 1980s. MEMS technologies offer the advantages of batch fabrication of numbers of devices as well as an ability to integrate multiple functional units in a small area, which is important for developing smart and sophisticated devices. By using top-down technology such as MEMS, material costs and the amount of waste can be reduced, thus having a potential to meet the requirements to improve global health. This book also examines a 4-step process for analysing medication adherence data generated by MEMS and similar electronic monitoring devises. Example analyses are presented to demonstrate these methods using MEMS data HIV-positive subjects' adherence to antiretroviral medications. Other chapters in this book examine power MEMS, defined as microsystems for power generation and energy conversion, including propulsion and cooling, novel optical MEMS device that can fully characterise the transparent living cells or microparticles in real time, an adaptive sliding mode controller for a MEMS vibratory z-axis gyroscope, and the use of nanofretting in nano/microelectromechanical systems (NEMS/MEMS).

Productspecificaties

Inhoud

Taal
Engels
Bindwijze
Hardcover
Verschijningsdatum
maart 2011
Aantal pagina's
391 pagina's
Illustraties
Nee

Betrokkenen

Redacteur
Britt Ekwall
Co-redacteur
Mikkel Cronquist

EAN

EAN
9781608764747

Overige kenmerken

Extra groot lettertype
Nee
Gewicht
892 g
Verpakking breedte
260 mm
Verpakking hoogte
25 mm
Verpakking lengte
180 mm

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