Microlithography Science and Technology

Uitgever: Crc Press

Taal: Engels

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Engels
Paperback
9781032836737
24 juni 2024
850 pagina's

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Samenvatting

Like the bestselling original, this third edition of Microlithography is a self-contained text detailing both elementary and advanced aspects of submicron microlithography, offering a balanced treatment of theoretical and operating practices.

The completely revised Third Edition to the bestselling Microlithography: Science and Technology provides a balanced treatment of theoretical and operational considerations, from fundamental principles to advanced topics of nanoscale lithography. The book is divided into chapters covering all important aspects related to the imaging, materials, and processes that have been necessary to drive semiconductor lithography toward nanometer-scale generations. Renowned experts from the world�€�s leading academic and industrial organizations have provided in-depth coverage of the technologies involved in optical, deep-ultraviolet (DUV), immersion, multiple patterning, extreme ultraviolet (EUV), maskless, nanoimprint, and directed self-assembly lithography, together with comprehensive descriptions of the advanced materials and processes involved.

New in the Third Edition

In addition to the full revision of existing chapters, this new Third Edition features coverage of the technologies that have emerged over the past several years, including multiple patterning lithography, design for manufacturing, design process technology co-optimization, maskless lithography, and directed self-assembly. New advances in lithography modeling are covered as well as fully updated information detailing the new technologies, systems, materials, and processes for optical UV, DUV, immersion, and EUV lithography.

The Third Edition of Microlithography: Science and Technology authoritatively covers the science and engineering involved in the latest generations of microlithography and looks ahead to the future systems and technologies that will bring the next generations to fruition.

Loaded with illustrations, equations, tables, and time-saving references to the most current technology, this book is the most comprehensive and reliable source for anyone, from student to seasoned professional, looking to better understand the complex world of microlithography science and technology.

Productspecificaties

Inhoud

Taal: en
Bindwijze: Paperback
Oorspronkelijke releasedatum: 24 juni 2024
Aantal pagina's: 850

Betrokkenen

Hoofdredacteur: Bruce W. Smith
Hoofduitgeverij: Crc Press

Overige kenmerken

Editie: 3
Product breedte: 178 mm
Product lengte: 254 mm
Verpakking breedte: 178 mm
Verpakking lengte: 254 mm

EAN

EAN: 9781032836737

Je vindt dit artikel in

Categorieën: Wetenschap & Natuur

Technologie & Bouwkunde

Communicatietechnologie

Natuurkunde

Electrotechniek

Optische fysica

Boeken
Taal: Engels
Studieboek of algemeen: Studieboeken
Beschikbaarheid: Te reserveren
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